CX-032160: Investigation of Piezoelectric Materials on Semiconductors for High-Temperature

The Recipient shall conduct basic research and development activities related to the usage of commercially available piezoelectric films and wafer …

Office of NEPA Policy and Compliance

September 27, 2024
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The Recipient shall conduct basic research and development activities related to the usage of commercially available piezoelectric films and wafer bonded piezoelectric crystals on semiconductors, as platforms for surface acoustic wave resonator (SAWR) devices for high temperature / harsh environment (HT/HE) applications, to enable these technologies for future integration with high power/high temperature/harsh environment semiconductor electronics.