Sputter deposition is a physical vapor deposition method of depositing thin films on substrates. This EEC cover the activities for the preparation …
Office of NEPA Policy and Compliance
April 26, 2023
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Sputter deposition is a physical vapor deposition method of depositing thin films on substrates. This EEC cover the activities for the preparation of substrate, sputtering of the substrate, discard of the substrate and eventual discard of the sputter target.