CX-101763: Nanosecond Laser Drying in Wafer Foundries for Significant Energy Efficiency Improvement

Award Number: DE-EE0009126, CX(s) Applied: A9, B3.6, Advanced Manufacturing Office, Location(s): IA, Office(s): Golden Field Office

Office of NEPA Policy and Compliance

March 20, 2020
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Award Number: DE-EE0009126
CX(s) Applied: A9, B3.6
Advanced Manufacturing Office
Location(s): IA
Office(s): Golden Field Office

The U.S. Department of Energy (DOE) is proposing to provide funding to Iowa State University in Ames, IA (ISU) for the development of new energy efficiency techniques for laser surface drying in microelectronics wafer fabrication.